You are here

Back to top

Wafer Bonding: Applications and Technology (Paperback)

Wafer Bonding: Applications and Technology Cover Image
By Marin Alexe (Editor), Ulrich Gösele (Editor)
$493.99
Usually Ships in 1-5 Days

Description


The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.


Product Details
ISBN: 9783642059155
ISBN-10: 3642059155
Publisher: Springer
Publication Date: September 30th, 2011
Pages: 504
Language: English
Series: Springer Series in Materials Science