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Semiconductor Industrial Hygiene Handbook: Monitoring, Ventiliation, Equipment and Ergonomics (Hardcover)

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Description


This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.

Product Details
ISBN: 9780815513698
ISBN-10: 0815513690
Publisher: William Andrew
Publication Date: December 31st, 1995
Pages: 363
Language: English