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Laser Microfabrication: Thin Film Processes and Lithography (Hardcover)

Laser Microfabrication: Thin Film Processes and Lithography Cover Image
By Daniel J. Ehrlich (Editor), Jeffrey Y. Tsao (Editor)
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Description


This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

Product Details
ISBN: 9780122334306
ISBN-10: 0122334302
Publisher: Academic Press
Publication Date: May 28th, 1989
Pages: 587
Language: English